硅锭外型检测-2D/3D

本案例用于测量多晶硅锭的众多属性，如边长，角度或者对角线长度。硅锭的表面光洁度也可以得到测量。采用激光轮廓扫描仪的好处很多，如非接触，免磨损以及对被测物体无机械影响。相对于人工检测，该系统稳定性非常高。

The optical dimensionCONTROL 8260 for Ingots inspection system for silicon ingots automatically measures the surface of the ingot and automatically performs, among other  things,  a  measurement  of  the  side lengths, phase lengths, angles and diagonal  lengths.  The  flatness  of  the  side  surfaces is also measured.The  automated  optical  inspection  opens up numerous benefits. It is non-contacting, wear-free and does not exert any kind of mechanical influences on the target and, in contrast to manual inspection, repeatability is very high。